Silicon carbide optic

SPECIFICATIONS
• Surface roughness down to < 3 angstroms RMS
• Form tolerance: up to λ/100 rms
• Diameter: < 1 meter
• Surface Quality: < 20/10
• Materials: CVC SiC, CVD clad, Si clad
• Coating: Al, Ag, Au, specialty designs for high damage threshold
• Component types: Flats, spheres, freeform, lightweight mirrors & wafer chucks
• Polishing up to 1-meter diameter optics
• MRF polishing up to 200-mm diameters
• Aspheric optics polishing & testing

silicon-carbide

KEY BENEFITS
• Resistant to dynamic & gravitational deflection 
• Fast thermal stabilization
• Integrated mechanical fasteners

APPLICATIONS
• Aerospace
• Semiconductor Lithography
• Astronomy
• Research
• Industry

METROLOGY FACILITIES AND CAPABILITIES

FACILITIES
• Multiple phase-measuring interferometers up to 700 mm aperture
• Surface roughness testing with Zygo NewView 6000 and Wyko RST
• Profilometers
• Surface feature microscopy
• Zeeko Robotic polishing of large complex elements.

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ARDOP - Optics & Optoelectronics
Cité de la Photonique,
11 Avenue de la Canterranne
33600 Pessac - FRANCE

phone +33 1 69 63 26 09
fax + 33 1 69 63 93 44
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